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Precision XY stage Product List

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Electric Actuator DX (Precision Stage) [THK Official]

High rigidity and capable of accommodating low spaces with a reduced height.

The THK electric actuator precision stage series DX (hollow XY stage) is a high-rigidity, low-profile hollow XY stage. By arranging each axis, guide center, and drive center of the feed ball screw at the same height, it minimizes posture changes and enables high-precision positioning. Additionally, on the related links, we have prepared a wealth of technical information, including more detailed product descriptions, product catalogs, user manuals, specification drawings, dimension tables, and 2D CAD files. Please take a look at those as well.

  • Semiconductor inspection/test equipment
  • Other machine elements
  • Actuator
  • Precision XY stage

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